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Research Article

Spectroscopic Ellipsometry Measurement and Modeling of Hydrogenated Amorphous Silicon

수소화된 비정질 실리콘의 타원편광분광분석 측정 및 모델링

Kim Ka-Hyun1*
김 가현1*
1Division of Energy & Optical Technology Convergence, Cheongju University, Professor
1청주대학교 에너지광기술융합학부, 조교수
*Corresponding Author 
28 February 2019. pp. 11-19
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Abstract

Spectroscopic ellipsometry is a powerful tool for analyzing optical properties of material. Ellipsometry measurement results is usually given by change of polarization state of probe light, so the measured result should be properly treated and transformed to meaningful parameters by transformation and modeling of the measurement result. In case of hydrogenated amorphous silicon, Tauc-Lorentz dispersion is usually used to model the measured ellipsometry spectrum. In this paper, modeling of spectroscopic ellipsometry result of hydrogenated amorphous silicon using Tauc-Lorentz dispersion is discussed.

Keywords
hydrogenated amorphous silicon
thin film silicon
spectroscopic ellipsometry

키워드
수소화된 비정질 실리콘
박막 실리콘
타원편광분광법
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Information
  • Publisher :Korean Solar Energy Society
  • Publisher(Ko) :한국태양에너지학회
  • Journal Title :Journal of the Korean Solar Energy Society
  • Journal Title(Ko) :한국태양에너지학회 논문집
  • Volume : 39
  • No :1
  • Pages :11-19
  • Received Date : 2019-01-17
  • Revised Date : 2019-01-29
  • Accepted Date : 2019-01-30
  • DOI :https://doi.org/10.7836/kses.2019.39.1.011
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